We offer a variety of new parts, spareparts, refurbishment and modification of components, as well as full tool refurbishments for SEZ/LAM wet etch tools.
With over 25 years of experience at our disposal we are able to offer a wide spectrum of existing systems
Particularly we are still able to deliver parts for the first generations (RST100/101/102/103 – SP200/201/203/223 – wet master – 304 – 323 – 4200 – 4300 and DV Tools).
Refurbishments are carried out in our own clean room according to Semi Standard, and include installation and training.
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