Brochures
SEZ TOOLS
Overview
We offer a variety of new parts, spareparts, refurbishment and modification of components, as well as full tool refurbishments for SEZ/LAM wet etch tools.
With over 25 years of experience at our disposal we are able to offer a wide spectrum of existing systems
Particularly we are still able to deliver parts for the first generations (RST100/101/102/103 – SP200/201/203/223 – wet master – 304 – 323 – 4200 – 4300 and DV Tools).
Refurbishments are carried out in our own clean room according to Semi Standard, and include installation and training.
Download PDFOZONE GENERATORS
Overview
- We provide Ozone Generators repair and overhaul services.
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Our benefits include:
- same specification as OEM
- fast lead time
- affordable prices
- Brands : MKS (Astek/InUSA) and many others.
- Do check with us for your inquiries.
SEMITOOL PLATFORMS
Turnkey Solutions
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We take in the Tool/Process specs and design a system spec for a tool to refurbish and meet the customers specs. We work together from:
- Spec setting
- Tool configuration
- Tool sourcing (if non existent)
- Complete refurb and overhaul
- Installation and Process approval
- Warranty on the system and function
COATER / DEVELOPER PLATFORMS
Turnkey Solutions
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We take in the Hardware & Process specifications, and design a system for a tool to be refurbished that meet the customers requirement. We work together from:
- Specifications setting
- Tool configuration
- Tool sourcing (if non-existent)
- Complete refurb and overhaul
- Installation and Process approval
- Warranty on the system and function
Hitachi CD SEM Equipment and Lasers
Outline
- We are dealing with semiconductor spare parts for Hitachi CD SEM equipment and lasers in particular to precision and surface scan.
- We also provides services for periodical maintenance/repair module/installation/un-installation for Hitachi CDSEM & SEM equipment.
- We also provides services to repair & overhaul Laser (Precision & Surface Scan)
ASM
Tools, Parts, and Upgrades Overview
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We take in the Tool/Process
specs and design a system spec
for a tool to refurbish and meet
the customers specs. We work
together from:
- Specifications setting
- Tool configuration
- Tool sourcing (if non-existent)
- Complete refurb and overhaul
- Installation and Process approval
- Warranty on the system and function
HP LASER HEAD REFURBISHMENT
REFURBISHMENT
- Replacement of power circuit electrolytic capacitor
- New laser tube replacement
- Lens and mirror clean and alignment
- Power and frequency tuning