Our Vision


To be the global supplier of choice for upkeep and capacity extensions for used wet tools.

Brochures

SEZ TOOLS

Overview

We offer a variety of new parts, spareparts, refurbishment and modification of components, as well as full tool refurbishments for SEZ/LAM wet etch tools.

With over 25 years of experience at our disposal we are able to offer a wide spectrum of existing systems

Particularly we are still able to deliver parts for the first generations (RST100/101/102/103 – SP200/201/203/223 – wet master – 304 – 323 – 4200 – 4300 and DV Tools).

Refurbishments are carried out in our own clean room according to Semi Standard, and include installation and training.

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OZONE GENERATORS

Overview

  • We provide Ozone Generators repair and overhaul services.
  • Our benefits include:
    • same specification as OEM
    • fast lead time
    • affordable prices
  • Brands : MKS (Astek/InUSA) and many others.
  • Do check with us for your inquiries.
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SEMITOOL PLATFORMS

Turnkey Solutions

  • We take in the Tool/Process specs and design a system spec for a tool to refurbish and meet the customers specs. We work together from:
    • Spec setting
    • Tool configuration
    • Tool sourcing (if non existent)
    • Complete refurb and overhaul
    • Installation and Process approval
    • Warranty on the system and function
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COATER / DEVELOPER PLATFORMS

Turnkey Solutions

  • We take in the Hardware & Process specifications, and design a system for a tool to be refurbished that meet the customers requirement. We work together from:
    • Specifications setting
    • Tool configuration
    • Tool sourcing (if non-existent)
    • Complete refurb and overhaul
    • Installation and Process approval
    • Warranty on the system and function
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Hitachi CD SEM Equipment and Lasers

Outline

  • We are dealing with semiconductor spare parts for Hitachi CD SEM equipment and lasers in particular to precision and surface scan.
  • We also provides services for periodical maintenance/repair module/installation/un-installation for Hitachi CDSEM & SEM equipment.
  • We also provides services to repair & overhaul Laser (Precision & Surface Scan)
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ASM

Tools, Parts, and Upgrades Overview

  • We take in the Tool/Process specs and design a system spec for a tool to refurbish and meet the customers specs. We work together from:
    • Specifications setting
    • Tool configuration
    • Tool sourcing (if non-existent)
    • Complete refurb and overhaul
    • Installation and Process approval
    • Warranty on the system and function
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