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| Tool | Part No | Description |
|---|---|---|
| 0040-61226 | Adapter Extension GGFP 300mm Xgen | |
| 0040-61258 | Pumpong Plate UHD 300mm Singen | |
| 0041-89679-01 | Adaptor shield | |
| 0041-89679-03 | Endura Adaptor Shield | |
| 0046629-001 | Z Bearing ECCENTRIC ASSEMBLE | |
| 0052385-000 | REGULATOR W/GAUGE 100 PSI STAGE MANIFOLD | |
| 0059303-004-Refurb | SP1UV Spindle Full Refurbishment 0059303-004-Rev AA- S/N 1606 | |
| 0071747-004AC-Refurb | Vacuum End Effector (Repair Service) (Refurbishment) | |
| 0090-09007 | ASST CENTERFINDER CABLE FEED THRU | |
| 0090-09010 | MOTOR BRAKE ASSY CASSETTE HANDLER | |
| 0090-09016 | FEED THRU ASSY CAP SENSOR | |
| 0090-75009 | MOTOR ENCODER ASSY ROBOT | |
| 0090-75011 | MOTOR BRK ENCODER ASSY 29POS STOR ELEV | |
| 0090-76110 | ASSEMBLY ELECTRICAL | |
| 009874-104 | Penta Convection Board | |
| 0100-00003 | VME STEPPER CONTROLLER I | |
| 0100-00008 | TC GAUGE PWB ASSY | |
| 0100-00011 | PWB ASSYCHOPPER DRIVE I | |
| 0100-00014 | Opto Detect Board Rev. J | |
| 0100-00084 | PCB ASSY CAPACITIVE SENSOR AMP | |
| 0100-00396 | Analog I/O Board Rev. 001 | |
| 0100-09009 | Buffer I/O Board Rev. H | |
| 0100-09011 | PCB ASSY AI MUX | |
| 0100-09054 | PCB ASSY ANALOG INPUT | |
| 0100-09056 | PCB ASSY CENTERFINDER SBC | |
| 0100-09127 | PCB ASSY INTERCONN BD WAFER SENSOR | |
| 0100-11002 | DIGITAL I/O PWB ASSY | |
| 0100-20001 | System Electronics Interface Board Rev. F | |
| 0100-35012 | Center Finder Receiver Board Rev. B | |
| 0100-35024 | Centerfinder SBC Assy Board Rev. P5 | |
| 0100-35036 | Dual Gas Leak Detector Board | |
| 0100-35049 | Sys. Reset / Intlk Sel. Board Rev. A | |
| 0100-35053 | Mainframe Interlocks Board; Schem. Ref. No 0130-35053 Rev. B | |
| 0100-35058 | Loadlock Interlocks Board; Schem. Ref. No 0130-35058 Rev. A | |
| 0100-35175 | Chamber Interface Board Rev. A | |
| 012_004_000 | G11 FI ContactLess Wafer Handler & Aligner Assy W/Contrller | |
| 013089-834-20-Refurb | Brooks Fix Load V6 Load Ports (Repair Service) | |
| 0140-00931 | Harness drivers LL/robot | |
| 0140-00932 | Extended harness for xfer upper driver | |
| 015_013_000 | Raider ECS Rotory Head Waferring PVDF with Shift protection | |
| 016_002_000 | Splash Protection for falcon DEV Cover (016_002_000) | |
| 0190-05387 | CONTROLLER1/2 RACK MAG. | |
| 0190-09118 | HYBRID SEAL ASSEMBLY | |
| 0190-09809R-Refurb | Refurbishment of AMAT VXP Producer Robot Mitsubishi HC-UFS30MW8-S2-W | |
| 0190-14344-Refurb | NSK DRIVER 0190-14344 - Refurbishment | |
| 0190-34165 | DRVR SERVO AMPLIFIER DUAL AXES 4A PK/3A 3B991.b.1.I | |
| 0190-76005 | VMEX SPC0005 Board Rev. B | |
| 0190-77344-OEM New | Transducer Plate No Drain Option 200mm | |
| 02-162113-00-Refurbishment | Clamp Shell Drive Assembly 300mm With OS (Refurbishment) | |
| 0200-00221 | INSULATOR PINLESS 8 |