| Applied Materials (AMAT) |
eMax CT plus |
eMax CT+ Dielectric etch chamber |
25596-07
|
12 |
2007 |
Dresden |
|
Inquire
|
| Applied Materials (AMAT) |
eMax CT plus |
eMax CT+ Dielectric etch chamber |
30999-13
|
12 |
2007 |
Dresden |
|
Inquire
|
| Applied Materials (AMAT) |
eMax CT |
eMax CT Dielectric etch chamber |
04403-10 |
12 |
2003 |
Dresden |
|
Inquire
|
| Applied Materials (AMAT) |
Axiom HT plus |
Axiom HT+ strip chamber |
08595-16 |
12 |
2007 |
Dresden |
|
Inquire
|
| Applied Materials (AMAT) |
Enabler |
Enabler Dielectric etch chamber |
11596-11 |
12 |
2007 |
Dresden |
|
Inquire
|
| Applied Materials (AMAT) |
Enabler |
Enabler Dielectric etch chamber |
29196-08 |
12 |
2007 |
Dresden |
|
Inquire
|
| ASM |
A412 |
Dual ATM Oxide (Dry Oxide) |
30227 |
|
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
|
30240 |
|
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Dual ATM Oxide (Dry Oxide) |
30360 |
12 |
2007 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Nitride Dual Reactor |
30127 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
|
30345 |
|
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30294 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30312 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30265 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30297 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30295 |
12 |
2006 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30271 |
12 |
2006 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Veritcal LPCVD Furnace (NITR) |
30270/10 |
12 |
2006 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
|
412050 |
|
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
|
412037 |
|
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
|
412039 |
|
|
Taiwan |
|
Inquire
|
| ASM |
A412 Plus |
|
2E6024 |
|
|
Taiwan |
|
Inquire
|
| ASM |
Eagle-12 Rapidfire |
PECVD (Chemical Vapor Deposition) |
1289 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
Eagle XP5 |
|
3E0251 |
|
|
Taiwan |
|
Inquire
|
| ASM |
Eagle XP-8 DCM |
|
3E0933 |
|
|
Taiwan |
|
Inquire
|
| ASM |
Epsilon E2000 Plus |
|
1E09595600 |
|
2011 |
Taiwan |
|
Inquire
|
| Bruker |
DektakXT |
|
|
|
|
Dresden |
|
Inquire
|
| ASM |
A400 Furnace Single Reactor |
Nitride, x01 Reactor |
2E0127/10 |
8 |
|
Dresden |
|
Inquire
|
| DNS |
FS-820 L |
Wafercleaner, 3 Baths |
58630-0184 |
6 |
|
Dresden |
|
Inquire
|
| DNS |
FS-820 L |
Wafercleaner, 3 Baths |
58630-0185 |
6 |
|
Dresden |
|
Inquire
|
| DNS |
SS-W60A-A |
|
59700-6224 |
|
|
Dresden |
|
Inquire
|
| Esec |
2008XP |
Die Bonder |
206010 |
6 |
2002 |
Philippines |
|
Inquire
|
| Esec |
2008XP |
Die Bonder |
206632 |
6 |
2004 |
Philippines |
|
Inquire
|
| Fluidair |
HF_HN03_HCl |
|
|
|
|
Dresden |
|
Inquire
|
| Hitachi |
CG4000 |
|
3106-02 |
12 |
|
Singapore |
|
Inquire |
| Hitachi |
S-4700 |
Scanning Electron Microscope |
5703-05 |
|
1997 |
Dresden |
|
Inquire
|
| Hitachi |
S-5000 |
|
6924-05 |
|
1999 |
Dresden |
|
Inquire
|
| Hitachi |
S-8840 |
CD-SEM |
9101-02 |
|
|
Singapore |
|
Inquire
|
| Hitachi |
S-9260A |
CD-SEM |
1140-05 |
8 |
2011 |
Dresden |
|
Inquire
|
| Hitachi |
S-9300 |
|
0301-03 |
|
1996 |
Dresden |
|
Inquire
|
| Hitachi |
S-9380 |
CD-SEM |
2121-04 |
|
|
Singapore |
|
Inquire
|
| Hitachi |
S-8820 |
CD-SEM |
8320-03 |
6 |
1995 |
Singapore |
|
Inquire
|
| Hitachi |
S-8820 |
CD-SEM |
8321-08 |
6 |
1995 |
Singapore |
|
Inquire
|
| Hitachi |
S-9260A |
CD-SEM |
1130-02 |
8 |
|
Singapore |
|
Inquire
|
| Hitachi |
S-9360 |
CD-SEM |
0106-04 |
8, 12 |
2012 |
Singapore |
|
Inquire
|
| Hitachi |
S-3400N |
SEM |
340760-02 |
|
2007 |
Singapore |
|
Inquire
|
| Hitachi |
S-4500 |
SEM |
7910-5 |
|
1993 |
Singapore |
|
Inquire
|
| Hitachi |
S-4800 |
SEM with EDX |
9140-05 |
|
2007 |
Singapore |
|
Inquire
|
| Hitachi |
S-5000 |
SEM |
914-03 |
|
1995 |
Singapore |
|
Inquire
|
| Hitachi |
S-5000H |
SEM |
6936-02 |
|
1998 |
Singapore |
|
Inquire
|
| KLA |
F5X |
Film measurement |
0012804 |
8 |
2000 |
Korea |
|
Inquire
|
| KLA |
SpectraFX200 |
Film measurement |
200603080655 |
12 |
2006 |
Korea |
|
Inquire
|
| KLA |
P20H |
Profiler |
250449 |
8 |
1996 |
Korea |
|
Inquire
|
| KLA Tencor |
P11 Surface Profiler |
|
04970190 |
|
|
Dresden |
|
Inquire
|
| KOKUSAI |
DD-1236VN-DF QUIXACE-2-LN |
|
T2DD6-18711 |
|
|
Taiwan |
|
Inquire
|
| KOKUSAI |
DJ-1223VN-DF QUIXACE-2-LN |
|
T2DC6-16441 |
|
|
Taiwan |
|
Inquire
|
| KOKUSAI |
DD-1223VN-DF QUIXACE-2-ULN |
|
T2DD6-18973-1 |
|
|
Taiwan |
|
Inquire
|
| LDS 1 |
200A |
Laserjet LDS |
29 |
|
|
Austria |
|
Inquire
|
| LDS 3 |
LGS 200A |
|
47 |
|
|
Austria |
|
Inquire
|
| Linn High Therm |
KH-64-S |
Coating oven |
FX039092 |
|
2009 |
Dresden |
|
Inquire
|
| Matech |
456G2 |
Waveetch |
|
|
|
Austria |
|
Inquire
|
| Nikon |
NSR-1505G7E |
|
92077 |
|
|
Dresden |
|
Inquire
|
| Nikon |
NSR-1755i7B |
|
94527 |
|
|
Dresden |
|
Inquire
|
| Prometrix |
FT750-01 |
|
9209 |
|
|
Dresden |
|
Inquire
|
| PVA TePLA |
300 AL PC |
Photoresist stripping, Surface cleaning… |
1480 |
6 |
2004 |
Dresden |
|
Inquire
|
| RECIF |
BPP200A01 |
Transfer Station |
314 / 337 / 340 / 401 / 402 / 447 |
|
2001 |
Dresden |
|
Inquire
|
| RECIF |
ANF8 |
Notch Aligner |
|
8 |
|
Dresden |
|
Inquire
|
| Rigaku Europa GmbH |
XRF 3630 |
Wafer Analyzer |
RR42036 |
8 |
1995 |
Dresden |
|
Inquire
|
| Semitool |
270S-6-1-E-ML |
Spin Rinse Dryer |
C211397-2 |
6 |
2002 |
Dresden |
|
Inquire
|
| Semitool |
270S-L |
Spin Rinse Dryer |
C44916-2 |
6 |
2002 |
Dresden |
|
Inquire
|
| Semitool |
2300S-6-1-ML |
|
8932.2 / 13666, 13668 |
8 |
|
Dresden |
|
Inquire
|
| Semitool |
280S-6-1-E-LH |
Spin Rinse Dryer |
14504 |
|
|
Dresden |
|
Inquire
|
| Semitool |
Raider |
ECD 310 |
T239383 |
12 |
2009 |
Philippines |
|
Inquire
|
| Semitool |
STORM |
300 |
T239537 |
12 |
2010 |
Philippines |
|
Inquire
|
| Semitool |
STORM II |
|
T238909 |
|
|
Philippines |
|
Inquire
|
| Semitool |
STORM 3 |
|
H92738 |
4 |
2009 |
Philippines |
|
Inquire
|
| Semitool |
SST 201 (Cintillio) |
1 Chamber |
102893 |
8 |
2011 |
China |
|
Inquire
|
| Semitool |
SST 742 |
Wet |
F59353 |
6 |
|
China |
|
Inquire
|
| Semitool |
SST 742 |
Wet |
F106911 |
8 |
|
Japan |
|
Inquire
|
| Semitool |
SST-C-632-280K |
Spray solvent tool |
F161017 |
8 |
1999 |
Philippines |
|
Inquire
|
| Semitool |
430-S-4-1-ML-WP |
Spin Rinse Dry Tool |
11613 |
8 |
2006 |
Philippines |
|
Inquire
|
| SEZ |
RST 201 |
1 Chamber |
0196 |
6 |
1997 |
China |
*
|
Inquire
|
| SEZ |
303 |
1 Chamber |
0300 |
12 |
1998 |
Taiwan |
*
|
Inquire
|
| SEZ |
303 |
1 Chamber |
208 |
|
|
Taiwan |
*
|
Inquire
|
| SEZ |
304 |
1 Chamber |
438 |
8, 12 |
|
Taiwan |
*
|
Inquire
|
| SEZ |
SP304 |
Single wafer wet chemical processor |
947 |
12 |
2005 |
Austria |
*
|
Inquire
|
| SEZ |
SP304 |
Single wafer wet chemical processor |
1687 |
12 |
2005 |
Austria |
*
|
Inquire
|
| SEZ |
305 |
1 Chamber |
1032 |
8, 12 |
2006 |
Taiwan |
*
|
Inquire
|
| SEZ |
323 |
2 Chambers |
605 |
8, 12 |
2002 |
Taiwan |
*
|
Inquire
|
| SEZ |
323 |
2 Chambers |
623 |
8, 12 |
|
Taiwan |
*
|
Inquire
|
| SEZ |
323 |
2 Chambers |
01066 |
8, 12 |
2006 |
Taiwan |
'
*
|
Inquire
|
| SEZ |
323 |
2 Chambers |
0703 |
8, 12 |
2003 |
Taiwan |
*
|
Inquire
|
| SEZ |
323 |
2 Chambers |
00938 |
8, 12 |
2005 |
Taiwan |
*
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
875 |
8, 12 |
|
Taiwan |
*
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1225 |
8, 12 |
2007 |
Taiwan |
*
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1242 |
8, 12 |
2007 |
Taiwan |
*
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1227 |
8, 12 |
|
Taiwan |
*
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1138 |
8, 12 |
|
Taiwan |
*
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1137 |
8, 12 |
|
Taiwan |
