• Tool
    ASM A400C, Diffusion LPCVD
Tool Details
Brand ASM
Model A400
Description Nitride, x01 Reactor
Serial Number 2E0127/10
Wafersize 8
Year of Manufacture
Location Dresden
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More Details

# File Name Action
1 Data Sheet ASM 200mm DIFFUSION LPCVD A400C rev3.pdf View PDF

Gallery