• Tool
    LAM LAM 4520i (Oxid)
Tool Details
Brand LAM
Model LAM 4520i (Oxid)
Description Isotropic Chamber, Etch Chamber
Serial Number 3660
Wafersize 6
Year of Manufacture 2004/11
Location Dresden
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More Details

# File Name Action
1 Data Sheet LAM 4520i 150mm rev3 sn3660.pdf View PDF

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