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Tool
TEL Trias TiN Chamber CVD314-02D
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Tool Details
Brand
TEL
Model
Trias TiN Chamber CVD314-02D
Description
Serial Number
C13503
Wafersize
12
Year of Manufacture
Location
STOREL-Austria
More Details
#
File Name
Action
1
TEL Trias TI TiN-ALD SN C13503.pdf
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