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  • Tool
    ASM Epsilon E2000 (Convert from E2500)
Tool Details
Brand ASM
Model Epsilon E2000 (Convert from E2500)
Description Epi ATM
Serial Number 90780
Wafersize 8
Year of Manufacture
Location Japan

More Details

# File Name Action
1 ASM Epsilon2000 EPI ATM, convert from E2500 Datasheet.pdf View PDF

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