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ASM Epsilon E2000
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Tool Details
Brand
ASM
Model
Epsilon E2000
Description
Epi RP SiGe Process
Serial Number
095440
Wafersize
6, 8
Year of Manufacture
2009
Location
Japan
More Details
#
File Name
Action
1
ASM Epsilon2000 Epi RP SiGe Datasheet.pdf
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