| AMAT |
Semivision CX200 |
- |
W-853 |
|
|
Singapore |
|
Inquire |
| Applied Materials (AMAT) |
eMax CT plus |
eMax CT+ Dielectric etch chamber |
25596-07
|
12 |
2007 |
Austria |
|
Inquire
|
| Applied Materials (AMAT) |
eMax CT plus |
eMax CT+ Dielectric etch chamber |
30999-13
|
12 |
2007 |
Austria |
|
Inquire
|
| Applied Materials (AMAT) |
eMax CT |
eMax CT Dielectric etch chamber |
04403-10 |
12 |
2003 |
Austria |
|
Inquire
|
| Applied Materials (AMAT) |
Axiom HT plus |
Axiom HT+ strip chamber |
08595-16 |
12 |
2007 |
Austria |
|
Inquire
|
| Applied Materials (AMAT) |
Enabler |
Enabler Dielectric etch chamber |
11596-11 |
12 |
2007 |
Austria |
|
Inquire
|
| Applied Materials (AMAT) |
Enabler |
Enabler Dielectric etch chamber |
29196-08 |
12 |
2007 |
Austria |
|
Inquire
|
| ASM |
A412 |
Dual ATM Oxide (Dry Oxide) |
30360 |
12 |
2007 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Dual Reactor Poly |
30412 |
12 |
2004 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Dual Reactor Poly |
30350 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Nitride Dual Reactor |
30127 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30294 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30312 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30265 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30297 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30295 |
12 |
2006 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Vertical LPCVD Furnace (Poly) |
30271 |
12 |
2006 |
Taiwan |
|
Inquire
|
| ASM |
A412 |
Veritcal LPCVD Furnace (NITR) |
30270/10 |
12 |
2006 |
Taiwan |
|
Inquire
|
| ASM |
Eagle-12 Rapidfire |
PECVD (Chemical Vapor Deposition) |
1289 |
12 |
|
Taiwan |
|
Inquire
|
| ASM |
A400 Furnace Single Reactor |
Nitride, x01 Reactor |
2E0127/10 |
8 |
|
Dresden |
|
Inquire
|
| Comet |
(7) R20 Transfer Station |
|
HATS10 |
6, 8 |
|
Dresden |
|
Inquire
|
| Comet |
Comet 2 Station wafer Transfer System |
|
10AA0602 |
|
|
Dresden |
|
Inquire
|
| DNS |
FS-820 L |
Wafercleaner, 3 Baths |
58630-0184 |
6 |
|
Dresden |
|
Inquire
|
| DNS |
FS-820 L |
Wafercleaner, 3 Baths |
58630-0185 |
6 |
|
Dresden |
|
Inquire
|
| Esec |
2008XP |
Die Bonder |
206010 |
6 |
2002 |
Philippines |
|
Inquire
|
| Esec |
2008XP |
Die Bonder |
206632 |
6 |
2004 |
Philippines |
|
Inquire
|
| FEI |
Helios 400 |
Dual Beam |
D5031 |
|
|
Singapore |
|
Inquire
|
| Hitachi |
CG4000 |
|
3106-02 |
12 |
|
Singapore |
|
Inquire |
| Hitachi |
S-8840 |
CD-SEM |
|
4,5,6,8 |
|
USA |
|
Inquire
|
| Hitachi |
S9200 |
CD-SEM |
|
5,6,8 |
|
Dresden |
|
Inquire
|
| Hitachi |
S9220 |
CD-SEM |
9744-06 |
8 |
|
Singapore |
|
Inquire
|
| Hitachi |
S-9260A |
CD-SEM |
1140-05 |
8 |
2011 |
Dresden |
|
Inquire
|
| Hitachi |
S-9260A |
CD-SEM |
1126-02 |
8 |
2003 |
Singapore |
|
Inquire
|
| Hitachi |
S-9260A |
CD-SEM |
1130-02 |
8 |
|
Singapore |
|
Inquire
|
| Hitachi |
S-9360 |
CD-SEM |
0106-04 |
8, 12 |
2012 |
Singapore |
|
Inquire
|
| Hitachi |
S-9380II |
CD-SEM |
|
8, 12 |
2009 |
Singapore |
|
Inquire
|
| Hitachi |
S-3400N |
SEM |
340760-02 |
|
2007 |
Singapore |
|
Inquire
|
| Hitachi |
S-4500 |
SEM |
7910-5 |
|
1993 |
Singapore |
|
Inquire
|
| Hitachi |
S-4800 |
SEM with EDX |
9140-05 |
|
2007 |
Singapore |
|
Inquire
|
| Hitachi |
S-5000 |
SEM |
914-03 |
|
1995 |
Singapore |
|
Inquire
|
| Hitachi |
S-5000H |
SEM |
6936-02 |
|
1998 |
Singapore |
|
Inquire
|
| IPEC/Westech |
Avanti 472 |
Wafer Polisher |
472-261 |
6 |
|
Dresden |
|
Inquire
|
| KLA |
F5X |
Film measurement |
0012804 |
8 |
2000 |
Korea |
|
Inquire
|
| KLA |
SpectraFX200 |
Film measurement |
200603080655 |
12 |
2006 |
Korea |
|
Inquire
|
| KLA |
P20H |
Profiler |
250449 |
8 |
1996 |
Korea |
|
Inquire
|
| KLA Tencor |
P11 Surface Profiler |
|
04970190 |
|
|
Dresden |
|
Inquire
|
| Leica |
Microscope INS 10 |
Microscope |
80135 |
6 |
1999 |
Dresden |
|
Inquire
|
| Linn High Therm |
KH-64-S |
Coating oven |
FX039092 |
|
2009 |
Dresden |
|
Inquire
|
| Philips |
XRF 2800 |
|
943002800001 |
8 |
2000 |
Dresden |
|
Inquire
|
| Prometrix |
FT750-01 |
|
9209 |
|
|
Dresden |
|
Inquire
|
| PVA TePLA |
300 AL PC |
Photoresist stripping, Surface cleaning… |
1479 |
6 |
2004 |
Dresden |
|
Inquire
|
| PVA TePLA |
300 AL PC |
Photoresist stripping, Surface cleaning… |
1480 |
6 |
2004 |
Dresden |
|
Inquire
|
| RECIF |
ANF8 |
Notch Aligner |
|
8 |
|
Dresden |
|
Inquire
|
| RECIF |
BPP200A01 |
Transfer Station |
|
|
|
Dresden |
|
Inquire
|
| Semitool |
Raider |
ECD 310 |
T239383 |
12 |
2009 |
Philippines |
|
Inquire
|
| Semitool |
Raider Mini Quatro |
|
T239257 |
|
|
Philippines |
|
Inquire
|
| Semitool |
STORM |
300 |
T239537 |
12 |
2010 |
Philippines |
|
Inquire
|
| Semitool |
STORM 3 |
|
H174554 |
6 |
|
Philippines |
|
Inquire
|
| Semitool |
STORM 3 |
|
H92738 |
4 |
|
Philippines |
|
Inquire
|
| Semitool |
SST 201 (Cintillio) |
1 Chamber |
102893 |
8 |
2011 |
China |
|
Inquire
|
| Semitool |
SST 742 |
Wet |
F59353 |
6 |
|
China |
|
Inquire
|
| Semitool |
SST 742 |
Wet |
F106911 |
8 |
|
Japan |
|
Inquire
|
| Semitool |
SSTC421280M |
Spray solvent tool (Phototresist) |
F110681 |
8 |
|
Dresden |
|
Inquire
|
| SEZ |
RST-101 |
1 Chamber |
0247 |
6 |
1997 |
Korea |
|
Inquire
|
| SEZ |
RST 201 |
1 Chamber |
0196 |
6 |
1997 |
Taiwan |
|
Inquire
|
| SEZ |
101 |
1 Chamber |
00277 |
4, 6 |
|
USA |
|
Inquire
|
| SEZ |
203 |
1 Chamber |
1157 |
4, 5, 6, 8 |
1999 |
Taiwan |
|
Inquire
|
| SEZ |
304 |
1 Chamber |
438 |
8, 12 |
|
Austria |
|
Inquire
|
| SEZ |
305 |
1 Chamber |
1032 |
8, 12 |
2006 |
Austria |
|
Inquire
|
| SEZ |
323 |
2 Chambers |
605 |
8, 12 |
2002 |
Austria |
|
Inquire
|
| SEZ |
323 |
2 Chambers |
623 |
8, 12 |
|
Austria |
|
Inquire
|
| SEZ |
323 |
2 Chambers |
00988 |
8, 12 |
2005 |
Austria |
|
Inquire
|
| SEZ |
323 |
2 Chambers |
01066 |
8, 12 |
2006 |
Austria |
|
Inquire
|
| SEZ |
323 |
2 Chambers |
0703 |
8, 12 |
2003 |
Austria |
|
Inquire
|
| SEZ |
323 |
2 Chambers |
00938 |
8, 12 |
2005 |
Taiwan |
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
875 |
8, 12 |
|
Austria |
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1225 |
8, 12 |
2007 |
Austria |
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1242 |
8, 12 |
2007 |
Austria |
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1227 |
8, 12 |
|
Taiwan |
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1138 |
8, 12 |
|
Taiwan |
|
Inquire
|
| SEZ |
DV34 |
4 Chambers |
1137 |
8, 12 |
|
Taiwan |
|
Inquire
|
| SEZ |
ES34 |
4 Chambers |
1125 |
8, 12 |
2008 |
Austria |
|
Inquire
|
| SEZ |
ES34 |
4 Chambers |
1160 |
8, 12 |
2008 |
Korea |
|
Inquire
|
| SEZ |
DV-Prime |
8 Chambers |
SP-01461 |
12 |
2011 |
Korea |
|
Inquire
|
| SEZ |
DV-Prime |
8 Chambers |
SP-01431 |
12 |
2011 |
Korea |
|
Inquire
|
| SEZ |
DV-Prime |
8 Chambers |
1347 |
12 |
2010 |
Korea |
|
Inquire
|
| Suss Microtec |
Falcon |
Coat / Develop |
AK243267 |
4, 5, 6, 8 |
2002 |
Austria |
|
Inquire
|
| Suss Microtec |
ACS200/Falcon |
3x Coater |
AK20032 |
4, 5, 6, 8 |
2000 |
Austria |
|
Inquire
|
| Suss Microtec |
ACS200/Falcon |
4x Developer |
AK20033 |
4, 5, 6, 8 |
2000 |
Austria |
|
Inquire
|
| Suss Microtec |
ACS300 |
4x Developer |
256426 |
8, 12 |
2008 |
Austria |
|
Inquire
|
| Suss Microtec |
Gamma |
|
300084 |
|
2010 |
Singapore |
|
Inquire
|
| Suss Microtec |
Gamma |
|
255653 |
|
2010 |
Singapore |
|
Inquire
|
| Suss Microtec |
Gamma 80 |
Coater-CSM |
AK-40126 |
|
|
Taiwan |
|
Inquire
|
| Suss Microtec |
Gamma 80 |
Coater-CSM |
|
|
|
Taiwan |
|
Inquire
|
| TEGAL |
Tegal 901 (Poly) |
Etch |
10764 |
6 |
|
Dresden |
|
Inquire
|
| Tegal |
OEM981 |
Etch |
|
8 |
|
Dresden |
|
Inquire
|
| TEL |
Expedius + |
|
W083557 |
12 |
2007 |
Taiwan |
|
Inquire
|
| TEL |
Expedius + |
|
W072491 |
12 |
2007 |
Taiwan |
|
Inquire
|
| TEL |
Ofen Tel Minibatch |
Formula Nitride |
P00000315001 |
12 |
2004 |
Dresden |
|
Inquire
|
| TEL |
Ofen Tel Minibatch |
Formula Oxide |
P00000315002 |
12 |
2004 |
Dresden |
|
Inquire
|
| TEL |
UW200Z |
Batch Wafer Processing |
R031085 |
8 |
2003 |
USA |
|
Inquire
|
| TePLA |
300 AL PC |
Plasma/Etch |
1414 |
6 |
2000 |
Dresden |
|
Inquire
|
| TePLA |
300 AL PC |
Plasma/Etch |
1390 |
6 |
2000 |
Dresden |
|
Inquire
|
| TePLA |
300 AL PC |
Plasma/Etch |
1394 |
6 |
2000 |
Dresden |
|
Inquire
|
| Teradyne |
D750EX |
|
0751DM487A |
|
|
Korea |
|
Inquire
|
| Teradyne |
D750EX |
|
0929DM515 |
|
|
Korea |
|
Inquire
|
| Teradyne |
D750EX |
|
0929DM516 |
|
|
Korea |
|
Inquire
|
| Teradyne |
D750EX |
|
0805DM489A |
|
|
Korea |
|
Inquire
|
| Teradyne |
D750EX |
|
074DM480A |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
846986 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
846998 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847007 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847008 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847009 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847017 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847031 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847032 |
|
|
Korea |
|
Inquire
|
| Teradyne |
Magnum II ICP |
|
847033 |
|
|
Korea |
|
Inquire
|
| Accretech TSK |
UF 200 |
Prober |
F02094JP |
8 |
|
Singapore |
|
Inquire
|
| Accretech TSK |
UF 200 |
Prober |
F12006MA |
8 |
|
Singapore |
|
Inquire
|
| Ultrafab |
WetBench QD72 |
2 tank Wet Bench |
15135-06 |
6 |
1995 |
Dresden |
|
Inquire
|
| Veeco |
Dektek 8 |
Metrology |
23089 |
|
|
Dresden |
|
Inquire
|
